Mu kupanga ma semiconductor, makina ogawa ma cryogenic akuyembekezeka kuchita zambiri osati kungosamutsa nayitrogeni kapena argon yamadzimadzi kuchokera pamalo amodzi kupita kwina. Madziwo ayenera kukhala okhazikika, oyera, komanso okhazikika mpaka pomwe akugwiritsidwa ntchito. Ngakhale kutentha pang'ono kungapange mpweya woyaka, kusinthasintha kwa kuthamanga kwa magazi, kapena kuipitsidwa ndi chinyezi komwe kumakhudza kukhazikika kwa njira.

Ichi ndichifukwa chakeChitoliro Chotetezedwa ndi ZitsuloMakinawa amagwiritsidwa ntchito kwambiri mu mafakitale a semiconductor m'malo mwa mapaipi achikhalidwe otetezedwa ndi thovu. Akaphatikizidwa ndi makina oyendetsedwa bwinoDongosolo la Pampu Yopumira Yopanda Mphamvu, kutentha konse komwe kumatuluka kumatha kukhala pansi pa 3 W/m pamene kukukhalabe ndi kukhazikika kwa vacuum kwa nthawi yayitali pamzere wonse wosinthira.

Pa ntchito za semiconductor, vacuum insulation siyenera kuonedwa ngati gawo lozungulira chitoliro. Ndi makina otenthetsera omwe amafunikira magwiridwe antchito oyezeka a vacuum komanso kusungidwa kwa nthawi yayitali. M'malo opangira ma chip olondola kwambiri, ngakhale kukwera pang'ono kwa kutentha kwamadzimadzi kungayambitse mikhalidwe yoyenda ya magawo awiri yomwe imasokoneza ma circuits ozizira, makina oyeretsera, kapena zida zowongolera njira.

Chifukwa Chake Kutentha Kumafunikira mu Machitidwe a Cryogenic Semiconductor

Mzere uliwonse wotumizira kutentha umakhudzidwa ndi mitundu itatu yayikulu yotumizira kutentha:

• kuwala kudutsa mumlengalenga
• mpweya wotuluka chifukwa cha mamolekyu otsala
• kuyendetsa kolimba kudzera m'machirikizo ndi ma spacers

Mu kapangidwe koyeneraChitoliro Chotetezedwa ndi Zitsulo, kuthamanga kwa mpweya nthawi zambiri kumachepetsedwa pansi pa 1 × 10⁻⁴ Pa. Pa mlingo wa vacuum umenewo, mamolekyu otsala a mpweya amakhala ndi njira yaulere yapakati yokulirapo kuposa kusiyana kwa mpweya, zomwe zimachepetsa kwambiri kutentha kwa mpweya.

Kutumiza kutentha kwa radiative kumayendetsedwa pogwiritsa ntchito multi-layer insulation (MLI). Kuteteza uku kumakhala ndi zigawo zosinthika za reflective foil ndi low-conductivity spacer material. Ndi kukhuthala koyenera kwa zigawo ndi njira yoyikira, radiative heat flux ingachepe kufika pa ma watts ochepa pa mita imodzi.

Njira yotsala ya kutentha imachokera makamaka ku zothandizira zamakina. Kuti achepetse izi, zipangizo zotsika mphamvu monga G-10 fiberglass kapena Torlon® nthawi zambiri zimagwiritsidwa ntchito. Zipangizozi zimafunikirabe mphamvu zokwanira zamakina kuti zipirire kugwedezeka kwa kutentha, kugwedezeka, ndi kugwedezeka kwa nthaka panthawi yogwira ntchito.

Pa mtunda wautali wotumizira, kusiyana pakati pa kutchinjiriza vacuum ndi kutchinjiriza thovu kumakhala koonekera kwambiri. Dongosolo lotchinjiriza vacuum losamalidwa bwino limatha kusunga kutentha kokhazikika kwa zaka zambiri, pomwe kutchinjiriza thovu pang'onopang'ono kumayamwa chinyezi kuchokera mumlengalenga. Chinyezi chikalowa mu kapangidwe ka kutchinjiriza ndi kuzizira, mphamvu ya kutentha nthawi zambiri imachepa pakapita nthawi.

Mu machitidwe ogawa LN₂ a semiconductor othandiza,mapaipi otetezedwa ndi vacuumZingachepetse kuwira kwambiri poyerekeza ndi mizere yachikhalidwe yotetezedwa ndi thovu, makamaka pamayendedwe akutali akunja kapena ma header opitilira kugwira ntchito.

Dongosolo la Pampu Yopumira Yopanda Mphamvu

Vuto limodzi ndi majekete a vacuum osasinthasintha ndilakuti ubwino wa vacuum ukhoza kuchepa pang'onopang'ono pakapita nthawi chifukwa cha mpweya woipa, kulowa kwa helium, kapena kutuluka kwa madzi m'thupi mwa microscopic.

Kuti tichite izi, tenga mtunda waukuluChitoliro Chotetezedwa ndi Zitsulomakina akhoza kukhala ndiDongosolo la Pampu Yopumira Yopanda MphamvuDongosololi nthawi zambiri limakhala ndi dongosolo laling'ono la turbomolecular kapena scroll pump lomwe nthawi ndi nthawi limabwezeretsa annular vacuum ku mawonekedwe ake oyambirira.

Magawo a vacuum amawunikidwa nthawi zonse pogwiritsa ntchito ma cold-cathode gauges. Pampu imagwira ntchito pokhapokha ngati mphamvu ya mpweya yakwera kupitirira malo omwe yayikidwa, kotero kuti kugwiritsa ntchito mphamvu ndi kukonza kumakhalabe kotsika.

Mu pulojekiti imodzi yokonzanso malo opangira ma semiconductor ku Hsinchu, Taiwan, makina opopera vacuum omwe amayendetsedwa bwino adalola mutu wosinthira wa LN₂ wokalamba kuti ubwezeretse magwiridwe antchito a kutentha pafupi ndi momwe unalili poyamba popanda kutseka chingwe chopangira. Pa mapulojekiti atsopano, kukonza vacuum yogwira ntchito kumapatsanso ogwiritsa ntchito chidaliro chabwino pakukhazikika kwa chitetezo cha nthawi yayitali pa moyo wonse wa makinawo.

Zipangizo ndi Kapangidwe ka Kachitidwe

Pa ntchito za semiconductor ndi ultra-high-purity, chitoliro chamkati nthawi zambiri chimapangidwa kuchokera ku chitsulo chosapanga dzimbiri cha 304L kapena 316L. Malo amkati amatsukidwa, kutsukidwa, ndi kusinthidwa kuti akwaniritse zofunikira pa ntchito yoyeretsa mpweya ndikuchepetsa chiopsezo cha kuipitsidwa.

Jekete lakunja lingagwiritse ntchito chitsulo chopakidwa utoto wa kaboni kapena chitsulo chosapanga dzimbiri kutengera malo oyikamo. M'malo oyandikana ndi chipinda choyera, majekete akunja osapanga dzimbiri nthawi zambiri amakondedwa kuti apewe dzimbiri kapena kuipitsidwa pamwamba.

Kuchepa kwa kutentha kuyeneranso kuganiziridwa mosamala. Mzere wotumizira wa LN₂ ukhoza kufupika pafupifupi 2.5–3 mm pa mita imodzi pakati pa kutentha kozungulira ndi kutentha kogwirira ntchito. Kuti muyamwitse kayendedwe kameneka, zoperekera mphamvu zowonjezera zamtundu wa bellows nthawi zambiri zimayikidwa pamalo owerengedwa a nangula pa netiweki yonse ya mapaipi.

Kumene kumafunika kuyenda kapena kusinthasintha,Paipi Yosinthasintha Yotetezedwa ndi VacuumMalo olumikizirana nthawi zambiri amagwiritsidwa ntchito. Malo odziwika bwino ndi monga kulumikiza matanki, kulumikizana kwa zida, nthambi zambirimbiri, ndi ma skid oyenda.

Mapaipi osinthasintha awa amagwiritsa ntchito core yamkati yokhala ndi corrugated pamodzi ndi vacuum jekete ndi kapangidwe ka MLI kofanana ndi chitoliro cholimba cha vacuum. Mipando yokonzedwa bwino imatha kusunga umphumphu wa vacuum pambuyo pa kutentha kobwerezabwereza komanso kupewa kupangika kwa ayezi wakunja komwe kumachitika kawirikawiri pamapaipi osakulungidwa ndi insulation.

Ma Vavu Otetezedwa ndi VacuumndiOlekanitsa Magawo

Kusamalira kutentha kotuluka sikungokhudza magawo a mapaipi owongoka okha.olekanitsa magawozimathandizanso kwambiri pakusunga kayendedwe ka madzi kosasunthika.

A Vacuum Insulated Valventhawi zambiri amagwiritsa ntchito bonnet yayitali komanso thupi lokhala ndi vacuum kuti asunge malo ofunikira otsekera kutali ndi kutentha kochepa kwambiri. Izi zimathandiza kupewa kuzizira mozungulira kulongedza kwa tsinde ndipo zimachepetsa kuzizira kosafunikira mkati mwa kapangidwe ka valavu.

Popanda kutchinjiriza vacuum, ma valve amatha kukhala malo otenthetsera kutentha kwambiri mkati mwa dongosolo. Mu ntchito yamadzimadzi yodzaza ndi cryogenic, izi zitha kupanga matumba a nthunzi m'malo ena, kusakhazikika kwa kayendedwe ka madzi, kapena zochitika za nyundo yamadzi.

Pa machitidwe a semiconductor process, ma valve otambasulidwa a globe ndi ma valve olowera pamwamba amagwiritsidwa ntchito nthawi zambiri mogwirizana ndi zofunikira za ASME B31.3 ndi EN 13480.

A Cholekanitsa Gawo Lotetezedwa ndi Vacuumimagwiritsidwa ntchito kuchotsa mpweya woyaka madzi asanalowe mu zida zobisika. Mu ntchito za semiconductor, kuyenda kosakhazikika kwa magawo awiri kungapangitse kusinthasintha kwakukulu kokwanira kuyambitsa ma alarm a process kapena ma interlocks a zida.

Mapangidwe ambiri olekanitsa amagwiritsa ntchito cholowera cha tangential pamodzi ndi kapangidwe ka demister yamkati kuti akonze bwino kulekanitsa kwa nthunzi ndi madzi. M'mapulojekiti ambiri, cholekanitsa chimaphatikizidwa ndi Mini Tank yomwe imayikidwa pafupi ndi pansi pa processing. Mini tank imagwira ntchito ngati local buffer voliyumu yomwe imathandiza kukhazikika kwa kusinthasintha kwa nthawi yochepa popanda kuyambitsa kutentha kowonjezera.

Chitsanzo cha Pulojekiti ya Semiconductor

Pulojekiti yokulitsa malo a DRAM ku South Korea idafuna netiweki yatsopano yogawa ya LN₂ yopereka zida zoyesera zoziziritsidwa m'madzi ndi zida zokonzera ma wafer.

Kukhazikitsako kunaphatikizapo chitoliro cholimba cha Vacuum Insulated Pipe cholumikizidwa ku nthambi zingapo za zida kudzera mu Vacuum Insulated Flexible Hose assemblies. Cholekanitsa cha Vacuum Insulated Phase Separator ndi thanki yaying'ono ya 2 m³ zinayikidwa pafupi ndi malo osungiramo zinthu zambiri.

Dongosolo la Dynamic Vacuum Pump System linasunga mphamvu ya annular pansi pa 5×10⁻⁶ mbar pa mizere yayikulu yotumizira ya mainchesi 6.

Pa nthawi yogwiritsa ntchito, kutentha komwe kunayezedwa pa mutu waukulu kunali pafupifupi 1.3 W/m2 pansi pa mikhalidwe yokhazikika yogwirira ntchito. Pambuyo pa chaka chimodzi chogwira ntchito mosalekeza, nthawi ndi nthawi zobwezeretsa vacuum zinasunga magwiridwe antchito a insulation pafupi ndi momwe zinalili poyamba.

Poyerekeza ndi lingaliro lakale lokhala ndi thovu loteteza ku zinthu zotentha, malo opangira zinthuwo adanenanso kuti kutayika kwa nayitrogeni wamadzimadzi kunali kochepa kwambiri komanso kuti kukhazikika kwa ntchito kunali bwino. Zolemba za ndondomekoyi sizinawonetsenso kuipitsidwa komwe kumachitika chifukwa cha chinyezi komwe kumakhudzana ndi kuwonongeka kwa zinthu zotenthetsera.

Mapulogalamu

Makina osinthira a cryogenic omwe amatetezedwa ndi vacuum amagwiritsidwa ntchito kwambiri popanga ma semiconductor, zomangamanga za LNG, kugawa mpweya m'mafakitale, komanso kugwiritsa ntchito hydrogen yamadzimadzi.

Ngakhale kuti malo ogwirira ntchito amasiyana, cholinga cha uinjiniya chimakhala chimodzimodzi:

• sungani bata la vacuum
• chepetsani kutentha komwe kumalowa
• kusunga kukhazikika kwa gawo panthawi yonse yosinthira

Kapangidwe ka dongosolo nthawi zambiri kamatsatira miyezo yapadziko lonse lapansi monga ASME B31.3, EN 13480, ndi ISO 21029 kutengera kukula kwa polojekitiyi komanso zofunikira m'chigawo.

Pa malo opangira ma semiconductor, magwiridwe antchito a cryogenic distribution system amakhudza mwachindunji magwiridwe antchito, kugwiritsa ntchito madzi, komanso kudalirika kwa ntchito kwa nthawi yayitali. Chifukwa cha izi, mapaipi, ma valve, olekanitsa, ndi makina osungira vacuum ayenera kupangidwa ngati makina amodzi ophatikizana a kutentha m'malo mwa zigawo zodziyimira pawokha.

At HL Cryogenics, timagwira ntchito ndi makontrakitala a EPC, makampani opanga gasi, ndi malo opangira ma semiconductor kuti tipange njira zosinthira ma cryogenic kutengera momwe zinthu zilili, zolinga zotenthetsera, ndi zofunikira pakuyika m'malo mosintha ma catalog.

Ngati mukukonzekera pulojekiti yatsopano ya semiconductor fab kapena kukweza netiweki yogawa ya LN₂ yomwe ilipo, gulu lathu la mainjiniya lingathandize kuwunika momwe kutentha kumayendera, njira yochotsera mpweya, ndi kasinthidwe ka makina kuti agwire ntchito kwa nthawi yayitali.