Pulojekiti ya Chip MBE Inamalizidwa Zaka Zapitazi

Zamakono

Molecular beam epitaxy, kapena MBE, ndi njira yatsopano yopangira mafilimu opyapyala apamwamba kwambiri pamakristasi. Mu ultra-high vacuum zinthu, ndi Kutentha mbaula ali okonzeka ndi mitundu yonse ya zigawo zikuluzikulu zofunika ndi kupanga nthunzi, kupyolera mabowo anapanga pambuyo collimating mtengo atomiki kapena molecular mtengo, jekeseni mwachindunji kutentha koyenera wa gawo lapansi limodzi galasi, kulamulira maselo mtengo. ndi gawo lapansi kupanga sikani pa nthawi yomweyo, akhoza kupanga mamolekyu kapena maatomu mu kristalo mayikidwe zigawo kupanga filimu woonda pa gawo lapansi "kukula".

Kuti zida za MBE zizigwira ntchito bwino, kuyeretsedwa kwakukulu, kutsika kwapansi komanso nayitrogeni yamadzi yoyera kwambiri imafunika kutumizidwa mosalekeza komanso mosasunthika kupita kuchipinda chozizirira cha zida. Nthawi zambiri, thanki yomwe imapereka nayitrogeni wamadzimadzi imakhala ndi mphamvu yotulutsa pakati pa 0.3MPa ndi 0.8MPa.Nayitrogeni yamadzimadzi pa -196 ℃ imatenthedwa mosavuta kukhala nayitrogeni panthawi yoyendetsa mapaipi. Nayitrogeni wamadzimadzi wokhala ndi chiyerekezo cha mpweya wamadzi pafupifupi 1:700 ataphimbidwa mupaipi, amatenga malo ochulukirapo amadzimadzi a nayitrogeni ndikuchepetsa kuyenda bwino kumapeto kwa payipi yamadzimadzi ya nayitrogeni. Kuphatikiza apo, mu thanki yosungiramo nayitrogeni yamadzimadzi, pamakhala zinyalala zomwe sizinayeretsedwe. Mu mapaipi amadzimadzi a nayitrogeni, kukhalapo kwa mpweya wonyowa kudzatsogoleranso kubadwa kwa ice slag. Ngati zonyansazi zitatulutsidwa muzipangizozi, zingayambitse kuwonongeka kosayembekezereka kwa zida.

Choncho, nayitrogeni wamadzimadzi mu thanki yosungirako panja amatumizidwa ku zida za MBE mu msonkhano wopanda fumbi wokhala ndi mphamvu zambiri, kukhazikika komanso kuyeretsa, ndi kutsika kochepa, palibe nayitrogeni, palibe zodetsa, maola 24 osasokonezeka, dongosolo loyendetsa kayendetsedwe kameneka ndilo mankhwala oyenerera.

tcm (4)
tcm (1)
tcm (3)

Kufananiza zida za MBE

Kuyambira 2005, HL Cryogenic Equipment (HL CRYO) yakhala ikuwongolera ndikuwongolera dongosololi ndikugwirizana ndi opanga zida zapadziko lonse za MBE. Opanga zida za MBE, kuphatikiza DCA, REBER, ali ndi ubale wogwirizana ndi kampani yathu. Opanga zida za MBE, kuphatikiza DCA ndi REBER, agwirizana pama projekiti ambiri.

Riber SA ndiwotsogola padziko lonse lapansi wopereka zinthu zopangidwa ndi molecular beam epitaxy (MBE) ndi ntchito zina zofananira nazo pakufufuza kwama semiconductor komanso kugwiritsa ntchito mafakitale. Chipangizo cha Riber MBE chimatha kuyika zigawo zoonda kwambiri pagawo, ndikuwongolera kwambiri. Zida za vacuum za HL Cryogenic Equipment (HL CRYO) zili ndi Riber SA Zida zazikulu kwambiri ndi Riber 6000 ndipo zazing'ono kwambiri ndi Compact 21. Zili bwino ndipo zadziwika ndi makasitomala.

DCA ndiye MBE wotsogola padziko lonse lapansi. Kuyambira 1993, chitukuko mwadongosolo njira makutidwe ndi okosijeni, antioxidant gawo lapansi kutentha ndi magwero antioxidant wakhala ikuchitika. Pachifukwa ichi, ma laboratories ambiri otsogola asankha ukadaulo wa DCA oxide. Machitidwe ophatikizika a semiconductor MBE amagwiritsidwa ntchito padziko lonse lapansi. Makina ozungulira a nayitrogeni a VJ a HL Cryogenic Equipment (HL CRYO) ndi zida za MBE zamitundu ingapo ya DCA ali ndi chidziwitso chofananira pama projekiti ambiri, monga P600, R450, SGC800 etc.

tcm (2)

Table Performance

Shanghai Institute of Technical Physics, Chinese Academy of Sciences
11 Institute of China Electronics Technology Corporation
Institute of Semiconductors, Chinese Academy of Sciences
Huawei
Alibaba DAMO Academy
Malingaliro a kampani Powertech Technology Inc.
Malingaliro a kampani Delta Electronics Inc.
Zithunzi za Suzhou Everbright

Nthawi yotumiza: May-26-2021

Siyani Uthenga Wanu